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Monte Carlo Simulations of Focused Electron Beam Induced Etching
Monte Carlo Simulations of Focused Electron Beam Induced Etching
2014
Rajendra Timilsina
Philip D. Rack
Karsten Wolff
Michael Budach
Klaus Edinger
Keywords:
Cathode ray
Analytical chemistry
Monte Carlo method
Materials science
Etching
Molecular physics
Correction
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