Feeder organometallic compound containing gas

A stable organometallic compound containing gas over a long period of time to provide a supply device of an organic metal compound capable of supplying. A feed apparatus 1 of the organometallic compound containing gas comprises a container 10, a supply unit 13, and a high specific gravity thereof. Container 10 has an internal space 10a, an inlet 10b of the carrier gas, an outlet 10c. Inlet 10b is connected to the lower portion of the interior space 10a. Outlet 10c is connected to the upper portion of the internal space 10a. Supply unit 13 is positioned in the internal space 10a. The supply unit 13, a mixture of an organic metal compound containing particles and the filler are arranged. High specific gravity thereof is in the internal space 10a, is arranged on the supply unit 13. High specific gravity thereof is higher specific gravity than the organometallic compound containing particles. .FIELD 1