The charged particle device

The purpose of the present invention is to provide a charged particle device which has high differential pumping capability while maintaining a large dynamic range of a probe current by effectively disposing a differential pumping diaphragm (111) and an object limiting diaphragm (110). The charged particle device is characterized in that: a lens barrel comprising therein an optical system of a charged particle radiation device (100) has a first space (106) with a first vacuum degree and a second space (105) with a vacuum degree higher than the first vacuum degree, and an object limiting diaphragm (110) is disposed in the second space (105).