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Preparation of Cuprous Oxide (Cu 2 O) Thin Films by Reactive DC Magnetron Sputtering
Preparation of Cuprous Oxide (Cu 2 O) Thin Films by Reactive DC Magnetron Sputtering
2004
Kiichi Kamimura
Haruki Sano
Katsuya Abe
Rinpei Hayashibe
Tomohiko Yamakami
Masato Nakao
Yoshiharu Onuma
Keywords:
Sputter deposition
Oxide
Thin film
Electronic engineering
Engineering
Inorganic chemistry
Optics
Optoelectronics
Correction
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