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Influence of Deposition Temperature and Heat Treatment on Silicon Nitride Coat ing Deposited by LPCVD
Influence of Deposition Temperature and Heat Treatment on Silicon Nitride Coat ing Deposited by LPCVD
2019
Liao Chunjing
Dong Shaoming
Jin XiHai
Hu Jianbao
Zhang Xiangyu
Wu Hui-Xia
Keywords:
Deposition (law)
Composite material
Materials science
Chemical vapor deposition
Silicon nitride
Metallurgy
Chemical engineering
deposition temperature
Correction
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