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Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
Peculiarities of metal coatings deposition using magnetron sputtering systems with hot and evaporative targets
2018
G.A. Bleykher
Dmitrii V. Sidelev
Vladislav A. Grudinin
V. P. Krivobokov
Alena Yuryeva
Keywords:
Sputter deposition
Metallurgy
Materials science
Metal
Deposition (law)
Correction
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