Integration of tri-polar microelectrodes for performance enhancement of an impedance biosensor

Abstract This paper demonstrates the effect of microelectrodes configuration on the sensitivity and accuracy of the micro-electrical impedance spectroscopy (μEIS). Bi-polar and tri-polar microelectrodes configurations were presented, fabricated and experimentally used to extract the electrical parameters of Human Bone Osteosarcoma Epithelial (U2OS) viable and dead cells. A comparison between the experimental results are presented and discussed. These experimental results show that the tri-polar electrode configuration has higher sensitivity compared to bi-polar configuration.