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Esterverbindungen, polymers, photoresist compositions, and pattern forming method
Esterverbindungen, polymers, photoresist compositions, and pattern forming method
2001
Koji Hasegawa
Tsunehiro Nishi
Takeshi Kinsho
Takeru Watanabe
Mutsuo Nakashima
Seiichiro Tachibana
Jun Hatakeyama
Keywords:
Polymer
Photoresist
Organic chemistry
Materials science
Chemical engineering
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