Range parameters for low-energy (500–1500 eV) deuterium ions implanted into silicon, stainless steel and molybdenum

Abstract Range parameters for 500–1500 eV deuterons implanted at room temperature at incident fluences near saturation into amorphous silicon, 304 stainless steel and molybdenum have been determined using the D( 3 He,p) 4 He nuclear reaction. The finite depth resolution was taken into account in the evaluation of the data. A comparison has been made for each target material with the range parameters calculated by the TRIM-89 code. The experimental projected ranges are shown to be significantly lower than those predicted by TRIM-89 while the experimental range straggling agrees quite closely with the TRIM-89 prediction. This discrepancy is attributed to the difficulty of defining exactly the α-particle energy which corresponds to the target surface.