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Erzeugung ultradünner Schichten durch Spin-Coating-Prozesse†
Erzeugung ultradünner Schichten durch Spin-Coating-Prozesse†
1990
Sibylle Brosius
Gerhard Lange
Manfred Piesche
Hans-Bertram Wiegemann
Keywords:
Organic chemistry
Polymer
Chemistry
Thin film
Spin coating
Polymer chemistry
Chemical engineering
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