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Chemical Vapor Deposition using Pt(PF3)4 and Ni(PF3)4
Chemical Vapor Deposition using Pt(PF3)4 and Ni(PF3)4
2008
Masato Ishikawa
Ikuyo Muramoto
Hideaki Machida
Satoshi Imai
Atsushi Ogura
Yoshio Ohshita
Keywords:
Hybrid physical-chemical vapor deposition
Chemical vapor deposition
Inorganic chemistry
Chemistry
Chemical engineering
Materials science
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