Synthesis of Monodispersed CeO2 Nanoparticles Induced by Microwave Irradiation in Alcohol/Water Mixed Solvent and their Application in CMP

CeO2 nanoparticles were synthesized by homogeneous precipitation in mixed solvent of alcohol and deionized water under microwave radiation using Ce(NO3)3•6H2O and HMT as starting materials. The structure and morphology of the products were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), selected-area electron diffraction (SAED), and BET-N2. The oxide chemical mechanical polishing (CMP) behavior of the as-papered CeO2 abrasives was investigated by atomic force microscope (AFM). The results indicated that the obtained CeO2 particles were monodispersed with an average diameter of ca. 10 nm. There was a quite good consistency in the particle sizes from TEM and BET analyses. Polishing tests showed that the as-prepared ceria abrasives exhibited a good oxide CMP performance, which might attribute to the uniform size and shape of the as-prepared CeO2 particles. In addition, the polishing pressure had an obvious influence on the surface topography, profilogram and roughness.