Fabrication of midinfrared quantum cascade laser via oxygen-enhanced nonselective wet thermal oxidation

A native oxide confined quantum cascade laser operating at λ=5.4 μm was fabricated using oxygen-enhanced nonselective wet thermal oxidation. This process formed an insulating native oxide on the lattice matched In0.53Ga0.47As waveguide core layers and the strain compensated InAlAs/InGaAs active core region after oxidation at 500 °C with 0.7% O2 added relative to the N2 water vapor carrier gas. A device with a threshold current density of Jth=3.2 kA/cm2 was realized.