Formation of flat surfaces of optoelectronic components in diamond polishing

Based on the physical-statistical model of formation of workpiece material debris particles in diamond polishing, an analysis of removal rate and form accuracy has been performed for flat surfaces of optoelectronic components made of quartz, aluminum nitride, and gallium nitride. The most efficient values of kinematic parameters of machine tool setting have been defined to achieve the required shape-generation accuracy. The paper provides some findings of the experimental verification of calculated data on the removal rate in polishing and the form deviation of the machined surfaces.