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Peculiarities of Doped GaP Layers Growth by Plasma Enhanced Atomic Layer Deposition
Peculiarities of Doped GaP Layers Growth by Plasma Enhanced Atomic Layer Deposition
2019
Alexander S. Gudovskikh
Artem Baranov
I.A. Morozov
A V Uvarov
D. A. Kudryashov
Jean-Paul Kleider
Keywords:
Optoelectronics
Atomic layer deposition
Plasma
Doping
Materials science
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