Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil
2017
We demonstrate operation of an interferometric optical gyroscope that uses an on-chip 3m ultra-low-loss silicon nitride waveguide coil. The measured minimum waveguide loss of the waveguide coil fabricated using lithographic die stitching was 0.78 dB/m. The angle random walk and bias instability of the gyroscope were characterized to be 8.52 deg/hr 1/2 and 58.7 deg/hr respectively.
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