Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy
1999
The surface roughness of polished glass substrates and optical
thin-film coatings is studied with atomic force microscopy and x-ray
scattering. It is demonstrated that both methods permit the
determination of power spectral density functions in a wide range of
spatial frequencies. The results are in good quantitative
agreement.
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