Micromechanical component for the modulation of electromagnetic radiation and optical system having the same
2007
A micromechanical component (100) comprising: a substrate, which is structured so that the same is in a plate (1) formed with a modulation structure which is laterally deflectable and lateral radiation modulating effect, wherein the modulation structure is described by a Hadamard or a simplex matrix; and means (5) for lateral deflection (12, 13) of the plate (1).
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