Output network for a plasma power supply and plasma power supply

2011 
Output network (15) for a plasma supply device (10) for generating an output power ≥ 500 W at a substantially constant fundamental frequency ≥ 3 MHz and for supplying power to a plasma process, at which the generated output power is supplied, wherein the connectable to a high frequency power converter output network (15) having at least one output transformer (17, 17.1, 17.2) having a primary side and a secondary winding (18, 19), wherein at least one of the windings (18, 19) has a first partial winding (101b, 201b) and a second partial winding (103b, 203b ) which (in different layers 101, 103, 201, 203, 311, 312, 321, 322, 323, 324) by an insulator (100, 102, 102a, 102b, 200, 301-305) are arranged spaced apart, wherein the output transformer (17, 17.1, 17.2) is arranged, an output power ≥ 500 W to transmit ≥ 3 MHz at a frequency, characterized in that the first and second Partial winding (101b, 201b, 103b, 203b) are electrically connected in parallel, the winding parts (110a, 110b, 110c, 110d, 210a, 210b, 210c, 210d, 111a, 111b, 211a, 211b) of the different partial windings (101b, 201b, 103b, 203b) are arranged essentially congruent.
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