Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form

Boundary conditions for viscous flow thermal oxidation equations in pressure potential form are derived in a way which is physically consistent and also convenient for practical implementation. A role of the incompressibility constraint on oxide boundary is emphasised. A possibility to employ the standard piece-wise linear finite element or finite volume discretization schemes is justified. Importance and correctness of the derived boundary conditions are practically demonstrated in the simulation of the standard LOCOS process.