About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN

Applying transition metal nitrides of Mo and Cr, which are characterized by a relatively low heat of formation, as the components of the multilayer coating, the possibilities of elemental and structural engineering of vacuum-arc coatings under the influence of the bias potential U s and the reaction gas pressure P N are revealed. It was found that at a relatively small thickness of the layers of nanometer range, which provides superhard state of the coatings, the supply of U s with the value of above the critical leads to a drop in hardness, which can be explained by mixing of layers at the interphase boundary.