Determination of the area density and composition of alloy film using dual alpha particle energy loss

Abstract A novel method based on dual α-particles energy loss (DAEL) is proposed for measuring the area density and composition of binary alloy films. In order to obtain a dual-energy α-particles source, an ingenious design that utilizes the transmitted α-particles traveling the thin film as a new α-particles source is presented. Using the DAEL technique, the area density and composition of Au/Cu film are determined accurately with an uncertainty of better than 10%. Finally, some measures for improving the combined uncertainty are discussed.