Cassette jig for wafer cleaning apparatus and cassette assembly having the same

PURPOSE: A cassette jig for a wafer cleaning device and a cassette assembly with the same are provided to use one cassette jig in a large wafer, a middle wafer, and a small wafer, thereby saving installation costs and maintenance costs. CONSTITUTION: A cassette jig(100) comprises a jig body(101) and a guide member(102). The jig body forms an internal space in which a plurality of first wafers is loaded at a fixed interval. The guide member mounts a separate cassette unit(200) in the jig body. A guide groove(102a) guides insertion of an outer corner unit of the cassette unit. The guide groove is formed in the inner part of the guide member. The cassette unit receives a second wafer.