A process for producing silicon-containing ceramic structures

The present invention relates to a process for the preparation of silicon-containing ceramic structures (3), wherein on the surface of a substrate (2) structures of a preceramic polymer (1) are provided, wherein the preceramic polymer is selected from the group comprising polysiloxanes, polycarbosilanes, polysilazanes wherein the preceramic structure (1) on the substrate (2) are ceramized and / or polyureasilazanes and. In the inventive method, the structures (1) the preceramic polymer have a height of ≦ 20 microns and a width perpendicular to its longitudinal axis to (a, a ') of ≦ 500 microns. The present invention further relates to a silicon-containing ceramic structure obtainable according to the invention (3) and a sensor comprising such a structure.