Improved triangular voltage sweep (TVS) technique for measurement of ionic charge in MOS structures
1993
The sensitivity and accuracy of the conventional TVS technique is influenced by a capacitive current associated with the MOS capacitor which is superimposed on the ionic current. The Letter presents a new method and measuring circuit for automatic compensation of the capacitive current at the input of the current measuring instrument.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
6
References
5
Citations
NaN
KQI