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Increase of Carbon Substitutionality and Silicon Strain by Molecular Ion Implantation
Increase of Carbon Substitutionality and Silicon Strain by Molecular Ion Implantation
2007
Andrei Li-Fatou
Amitabh Jain
Wade Krull
Mike Ameen
Mark Harris
Dale C. Jacobson
Keywords:
Polyatomic ion
Radiochemistry
Carbon
Strain (chemistry)
Materials science
Silicon
Chemical engineering
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