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Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
1995
Jean Michel Karam
John Yasaitis
Semiconductor Equipment
Keywords:
Surface micromachining
Chemical engineering
Microfabrication
Engineering
Mechanical engineering
Electrical engineering
Nanotechnology
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