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10x reduction imaging at 13.4 nm
10x reduction imaging at 13.4 nm
1994
Daniel A. Tichenor
Glenn D. Kubiak
Michael E. Malinowski
Keywords:
Extreme ultraviolet
Excimer laser
Numerical aperture
Depth of field
Image resolution
Full width at half maximum
Field of view
Image processing
Materials science
Analytical chemistry
Optics
Correction
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