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Micromechanical resonators with sub-micron capacitive gaps in 2 [micro sign]m process
Micromechanical resonators with sub-micron capacitive gaps in 2 [micro sign]m process
2007
Lichun Shao
M. Palaniapan
L. Khine
Woei Wan Tan
Keywords:
Micrometre
Capacitive sensing
Resonator
Electronic engineering
Mathematics
Correction
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