The formation of a homogeneous α-alumina coating on a Ni-based superalloy from a layer stack deposited by cathodic arc evaporation

Abstract Cathodic arc evaporation was applied to form a layer stack on a Ni-based superalloy single crystalline substrate in a single in-situ vacuum deposition process. The initial layer was deposited using a target with the same nominal composition as the superalloy substrate. Subsequently, a second layer was deposited using a target with a composition of 70 at.% Al and 30 at.% Cr, and the deposition was conducted in flowing oxygen to form Al-Cr-O. The thermal stability of the layer stack was investigated by means of a heat treatment at 1100 °C in air. The substrate-like coating recrystallized at elevated temperature and showed epitaxial growth on the superalloy single crystal, according to transmission Kikuchi diffraction measurements. A thin layer of pure α-alumina formed on top of the substrate-like coating and a compact Al-Cr-O phase with corundum structure developed towards the top of the coating. Microstructural and chemical analyses of the coating architectures in the as-deposited and annealed states were performed by means of transmission electron microscopy, energy dispersive X-ray spectroscopy, X-ray diffraction and Rutherford backscattering spectrometry, and utilized to explain the recrystallization and diffusion processes in the layer stack.