Multigrid Method to Solve Squeeze Film Damping of Micro-resonantor

In view of the problems existing in the process of solving squeeze film damping,this paper uses the multigrid method to solve the squeeze film damping of micro-resonator and gets a satisfying result.The multigrid algorithm is considered to have the advantage of rapid convergence and good numerical stability in solving the liquid questions of squeeze film damping.The pressure distribution function between resonator plates and the value of various performance indicators are obtained.The relationships between the frequency and the amplitude,the frequency and the phase as well as the characteristics of damping force are studied.