Si 3 N 4 nano-microsphere synthesized by cathode arc plasma and heat treatment

The Si3N4 microcrystals with a hollow sphere structure were prepared by using the simple heat treatment of the Si3N4 flakes, which were prepared by using the cathode arc plasma. The products were characterized by XRD, SEM and TEM. The photoluminescence (PL) spectrum of the Si3N4 nano-microsphere was studied. The obtained Si3N4 microcrystals, which show a hollow sphere structure, are up to several nanometers in diameter. During the process, the heat treatment and Ni catalyst play a key role in the forming structure and morphology. This result provides a possibility for mass producing Si3N4 microcrystals.