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Combining Embedded and Overlayer Compressive Stressors in Advanced SOI CMOS Technologies
Combining Embedded and Overlayer Compressive Stressors in Advanced SOI CMOS Technologies
2005
Andy Wei
Thorsten Kammler
Jörg Höntschel
Helmut Bierstedt
Jens-Peter Biethan
Andreas Hellmich
K. Hempel
J. Klais
Guido Koerner
Markus Lenski
T. Mantei
A. Neu
Ralf Otterbach
Carsten Reichel
Bernhard Trui
Gert Burbach
Thomas Feudel
Peter Javorka
Christoph Schwan
N. Kepler
H-J Engelmann
C. Ziemer-Popp
O. Herzog
D. Greenlaw
Michael Raab
Rolf Stephan
Manfred Horstmann
P.-O. Hansson
A. Samoilov
E. Sanchez
O. Luckner
S. Weiher-Telford
Keywords:
Nanotechnology
CMOS
Overlayer
Silicon on insulator
Materials science
soi cmos
Optoelectronics
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