Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

Ti1-xSixN (0 less than= x less than= 0.26) thin films are grown in mixed Ar/N-2 discharges using hybrid high-power pulsed and dc magnetron co-sputtering (HIPIMS/DCMS). In the first set of experimen ...