Electron backscatter measurements for perpendicular and non-perpendicular incidence at 1.0 MeV bombarding energy

Abstract Total energy spectra of backscattered electrons for 1.0-MeV electrons with perpendicular incidence on targets of saturation thicknesses of Al, Fe, Sn and Au are shown. The variation of the shape of the energy distributions with angle observed for Al and Fe is illustrated. Total backscatter coefficients of 0.08, 0.22, 0.37, and 0.51 were obtained for Al, Fe, Sn, and Au. Mapping of electrons backscattered from a saturation thickness of Al for an angle of incidence of 30° from the target plane was also carried out at 1.0 MeV. Angular distributions as a function of two angles and typical energy distributions are included.