Analysis of error and development of calibration's method to design precision rotating analyzer ellipsometer

12 In manufacturing a rotating-analyzer ellipsometer, error sources and calibration methods are discussed. It is important to get rid of external noise for measurement of high thickness resolution and accurate optical constant and this means that the precision of system above all is important to develop the ellipsometer. Therefore the precision design and error calibration of the optical components in ellipsometer are inevitable. We propose a PSA (polarizer-specimen-analyzer) system to manufacture a rotating-analyzer ellipsometer.