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Recent Progress in Organic Bottom Anti-reflective Coatings.
Recent Progress in Organic Bottom Anti-reflective Coatings.
2001
Xie Shao
Jim D. Meador
Shree Deshpande
Rama Puligadda
Kenichi Mizusawa
Shinya Arase
Keywords:
Nanotechnology
Photolithography
Anti-reflective coating
Materials science
anti reflective
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