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Ultra-low Damage Fabrication of Graphene Nanoribbons by Neutral Beam Etching
Ultra-low Damage Fabrication of Graphene Nanoribbons by Neutral Beam Etching
2013
Takeru Okada
C. Y. Su
C. H. Huang
Koki Igarashi
Akira Wada
L-J Li
K. I. Ho
P.W. Li
I.-H. Chen
C.-S. Lai
Seiji Samukawa
Keywords:
Graphene nanoribbons
Beam (structure)
Etching
Nanotechnology
Materials science
Fabrication
Correction
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