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On the Process and Material Sensitivities for High-k Based Dielectrics
On the Process and Material Sensitivities for High-k Based Dielectrics
2010
Sven Van Elshocht
Christoph Adelmann
M. Popovici
Johan Swerts
Annelies Delabie
Laura Nyns
Xiaoping Shi
Hilde Tielens
Geoffrey Pourtois
Nicolas Menou
Laurent Breuil
Dieter Pierreux
J. W. Maes
An Hardy
Marlies K. Van Bael
M. Jurczak
Jorge Kittl
Keywords:
High-κ dielectric
Dielectric
Analytical chemistry
Materials science
Optoelectronics
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