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Stress relaxation of tetrahedral amorphous-carbon (ta-C) thin films by pulsed excimer laser annealing.
Stress relaxation of tetrahedral amorphous-carbon (ta-C) thin films by pulsed excimer laser annealing.
2004
D. R. Tallant
Thomas A. Friedmann
John P. Sullivan
Brad Lee Boyce
Keywords:
Annealing (metallurgy)
Thin film
Amorphous solid
Excimer laser
Carbon film
Amorphous carbon
Carbon
Inorganic chemistry
Materials science
Ceramic materials
Stress relaxation
Tetrahedron
Composite material
Correction
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