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Development of Aluminum Nitride by Molecular Layer Deposition using Trimethylaluminum and Ammonia
Development of Aluminum Nitride by Molecular Layer Deposition using Trimethylaluminum and Ammonia
2006
Kimberly G. Reid
Anthony Dip
Sadao Sasaki
Keywords:
Inorganic chemistry
Materials science
Aluminium
Nitride
Ammonia
Chemical engineering
Deposition (law)
Correction
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