Improved aluminum coating

PURPOSE: To provide an anodizing aluminum coating having resistance against excitated halogen species for a comparatively long time and preventing corrosion of the aluminum underneath. CONSTITUTION: A metal oxide resistant to a reaction with halogen can be formed optionally by filling hollow pores in aluminum oxide with a metal such as magnesium or aluminum, or by filling the hollow pores with a halogen- trapping agent such as hydrogen ions. The hydrogen ions absorbed on the surface of aluminum oxide react with halogen for forming a volatile hydrogen halide which is pumped out from a semiconductor treating chamber by an exhaust system, thereby preventing the reaction of aluminum oxide beneath the anodizing aluminum with halogen. COPYRIGHT: (C)1995,JPO