Feasibility study of three-dimensional XRF spectrometry using μ-X-ray beams under grazing-exit conditions

Abstract Grazing-exit XRF (GE-XRF), where the X-ray fluorescence is measured at small take-off angles, is a method related to TXRF. It has been demonstrated that GE-XRF is useful for surface, thin-film and particle analyses. In GE-XRF, it is possible to use a μ-X-ray beam at a normal incidence. Thus, a laboratory GE-XRF instrument was developed in combination with a μ-XRF setup. A μ-X-ray beam was produced by the combination of a single capillary and a pinhole aperture. It was demonstrated that depth information could be obtained by using this setup and changing the exit angle. Therefore, this instrument enables measurement of surface-sensitive line scanning and elemental mapping under grazing-exit conditions. In principle, measuring the elemental X-ray mappings at different exit angles enables the reconstruction of three-dimensional elemental distributions. To confirm the feasibility of three-dimensional XRF, a type of Japanese lacquerware, ‘Tamamushi-nuri’, which has a layered structure near the surface, was measured.