Wideband high-frequency line-focus PVDF transducer for materials characterization

Abstract This paper presents the design, fabrication, operating characteristics and applications of a wideband, high-frequency, line-focus beam transducer we constructed using a 9 μm thick piezoelectric polyvinylidene fluoride (PVDF) film. This transducer possesses a focal length of 2.38 mm and an aperture angle of 84°. The frequency spectrum of the signal measured at the focal point indicates that the transducer has a wide frequency response which extends from 10 MHz to over 100 MHz. When compensated for the frequency-dependent attenuation of the coupling medium, the operational frequency exceeds 150 MHz. The transducer can be operated in a time-resolved pulse mode or in a radio-frequency (rf) tone burst mode. An application of the transducer to determine the anisotropic elastic property of a silicon wafer is demonstrated. The phase velocities of surface acoustic waves (SAW) propagating along various directions on the (0 0 1) surface of cubic silicon are measured and compared to computed values.