Method and apparatus for manufacturing a mass transfer device

To provide a manufacturing method and a manufacturing apparatus for mass transfer device for moving a specific substance by passing a fluid containing a uniform particular material flow path on fillable and substrate filler in the flow path. Method for producing a mass transfer device includes a step of preparing a substrate, forming a flow path on the surface of the substrate, in the flow path, a step of applying droplets made of filler and a liquid medium, the liquid medium by removing, and a step of filling the channel with a filler.