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Piezoelectric Multilayer Actuators for Nanopositioning Systems
Piezoelectric Multilayer Actuators for Nanopositioning Systems
2020
A.V. Dayneko
Pilot Line, Jsc, Moscow, Zelenograd, Russian Federation
V.G. Nikiphorov
A. M. Khramtsov
D.Yu. Shakhvorostov
T.V. Shogoleva
O.Sh. Mamin
Keywords:
Actuator
Acoustics
Piezoelectricity
Correction
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