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DEPOSITION OF PYROLYTIC ALUMINIUM OXIDE FILMS ON SI, GAAS, AND INP
DEPOSITION OF PYROLYTIC ALUMINIUM OXIDE FILMS ON SI, GAAS, AND INP
1991
O. N. Mittov
S. V. Fetisova
T. A. Gadebskya
I. I. Nevryuev
B. L. Agapov
Keywords:
Aluminium oxide
Pyrolytic carbon
Inorganic chemistry
Chemistry
Deposition (law)
Correction
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