A kind of SADP page buffers cutting-off method and structure

The present invention relates to a kind of SADP page buffers cutting-off method and structure, described method includes following steps：Step 1, covers two mandrels of page buffer using optical near-correction mould and is exposed, so as to cut off above-mentioned two mandrels；Step 2, all mandrels of above-mentioned page buffer are wrapped up using insulating layer, and cover above-mentioned all mandrels using double exposure hard mask and distance piece, are etched the mandrel along the double exposure hard mask and distance piece, are removed the insulating layer；All mandrels of step 2 are carried out re-expose by step 3, and fill conductive material in the gap of above-mentioned double exposure hard mask and distance piece, to form M2 layers.The present invention finally realizes the cut-out of three M2 lines by new M2 double exposure hard mask distance piece cutting-off methods, and improves technique controllability, improves operation allowance.