Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching
2005
Abstract Line patterns were machined on borosilicate (Pyrex 7740 glass) surface using the combination of mechanical machining by Nanoindenter ® XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched Pyrex 7740 glass surface was investigated.
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