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A Novel Approach to Isolating the Edge of the Shallow Trench Isolation in SiGe HBTs for Improved Device Performance
A Novel Approach to Isolating the Edge of the Shallow Trench Isolation in SiGe HBTs for Improved Device Performance
2006
R.A. Camillo-Castillo
Qizhi Liu
Vibhor Jain
James W. Adkisson
Marwan H. Khater
Peter B. Gray
John Jack Pekarik
R. Malladi
David Harame
Keywords:
Geology
Shallow trench isolation
Edge (geometry)
Optoelectronics
Correction
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